EE 115
Introduction to Micro-Electro-Mechanical-Systems (MEMS) design. Course begins with overview of MEMS devices and processes that are used to fabricate them. The basic governing equations for MEMS devices in different energy domains (mechanical, electrical, optical, thermal, and fluidic) reviewed, and both analytical and finite element coupled-domain modeling is used to design MEMS devices. Students work in teams to design, lay out, and fabricate MEMS devices and test structures using a standard multi-user process available through a foundry service. A presentation and term paper describing the design and layout will be required. Prerequisite(s): courses 70/L, 135/L, 145/L, Mathematics 19A and 19B, Mathematics 23A and 23B, Applied Mathematics and Statistics 27/L, Physics 5A, 5B, 5C, and 5D. Enrollment limited to 15. J. Kubby
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